为实现高效率、小型化、可调谐、室温下稳定运转的半导体太赫兹(THz)波源,提出了采用光子集成技术,将两个并联的分布反馈(DFB)激光器与无源多模干涉耦合器(MMI)集成,输出THz拍频抽运光束的方案。两DFB激光器的光栅布拉格波长设计偏调为4.8 nm(0.6 THz),通过改变集成器件中DFB激光器的注入电流进行波长调谐,每路DFB能够达到3.9 nm的波长偏调。将拍频光束通过单模光纤耦合到频域分辨光学门(FROG)中对THz拍频光束空间拍频包络进行测量,在不同的DFB区注入电流下,证实了集成芯片在0.184~1.02 THz频率调谐范围内可室温连续输出用于产生THz波的有效THz拍频光束。 In order to realize the THz wave source with high efficiency, small size, tunable and stable operation at room temperature, a photonic integration technique is proposed to combine two parallel distributed feedback (DFB) lasers and a passive multimode interference coupler (MMI) integrated, output THz beat frequency pumping beam program. The grating Bragg wavelength of both DFB lasers is designed to be 4.8 nm (0.6 THz) offset by wavelength tuning of the DFB laser’s injection current in the integrated device, resulting in a wavelength offset of 3.9 nm per DFB. The beat-frequency envelope of the THz beating beam was measured by coupling the beat beam to the FROG through a single-mode fiber. With different current injected into the DFB region, it was verified that the integrated chip has a better performance at 0.184 ~ 1.02 THz Within the frequency tuning range, a valid THz beat beam for THz wave output can be output continuously at room temperature.