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以掺镱大模面积光子晶体光纤(PCF)飞秒激光放大器为光源组建了一套结构紧凑且运行稳定的飞秒激光微纳加工系统,中心波长为1040 nm,重复频率50 MHz,最大平均功率16 W,光栅压缩后脉冲宽度85 fs。利用该套系统在硅片、金属薄膜(Cr膜、Al膜)上演示了微图案的刻划,并与采用重复频率1 kHz的固体钛宝石飞秒激光放大器的加工结果进行对比,发现利用新组建的加工系统进行微纳加工,由于单脉冲能量较小且便于调节,使得刻划微图案时边缘加工效果更容易控制,且避免了加工过程中未加工区域受到的污染,保护了制作衬底。显示了该套系统高重复频率和高平均功率的特性及其在改善微纳加工效果及明显提高加工效率方面的优势。
A compact and stable femtosecond laser micro / nano processing system with compact and stable operation was fabricated by using a ytterbium doped PCF femtosecond laser amplifier with a center wavelength of 1040 nm, a repetition frequency of 50 MHz and a maximum average power 16 W, pulse width after grating compression 85 fs. The system is used to demonstrate the micro-patterning on silicon films and metal films (Cr film, Al film) and compared with the processing results of solid titanium sapphire femtosecond laser amplifiers with repetition frequency of 1 kHz. Due to the small single pulse energy and easy adjustment, the edge processing effect is more easily controlled when the micro-pattern is engraved, and the unprocessed area in the processing process is also prevented from being polluted, thereby protecting the production of the substrate . This system shows the characteristics of high repetition rate and high average power of the system and its advantages in improving the micro-nano machining effect and obviously improving the processing efficiency.