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用传输矩阵方法 ,在简化的光学模型基础上 ,分别讨论了分布式Bragg反射镜DBR(DistributedBraggReflector)的生长精度及镜面起伏对 1.5 5 μmSi基MEMS (Micro Electro Mechanical System)可调谐光滤波器透射谱的影响 计算表明 :DBR生长误差仅使主透射峰位置发生变化 ,而镜面起伏是导致主透射峰性能劣化的主要原因 ,它使得FWHM增大 ,透射峰强度下降 理论计算结果能较好地解释实验现像 在此基础上 ,进一步讨论了引起镜面起伏的多种原因 ,并提出了可能的解决方法
Based on the simplified optical model, the transfer matrix method is used to analyze the propagation accuracy of the distributed Bragg reflector (DBR) and the influence of the mirror undulation on the transmission spectrum of the tunable optical filter with 1.5 5 μm Si MEMS (Micro Electro Mechanical System) The calculation results show that the DBR growth error only changes the position of the main transmission peak, and the mirror undulation is the main cause of the deterioration of the main transmission peak. It makes the FWHM increase and the theoretical calculation result of the transmission peak intensity can better explain the experiment On the basis of this, we further discuss the various causes of specular fluctuations and propose possible solutions