通过分析F-P扫描干涉仪的工作原理,基于STC89C52RC单片机,采用PA93功率放大器驱动压电陶瓷,设计了1 064nm平平腔结构的F-P扫描干涉仪。腔镜反射率为98%,精细度156,腔长0.1~100mm连续可调,对应自由光谱区1.5~1 500GHz和分辨率9.65~9 650MHz。压电陶瓷驱动电压和频率通过4×4矩阵键盘,可以在0~200V和1~30Hz连续可调,显示在1 602液晶屏上。同时可以通过RS232串口与计算机通讯,在上位机使用LabVIEW软件界面方便地设置压电陶瓷驱动电压和频率。最后使用该F-P扫描干涉仪,对激光二极管泵浦Nd:YVO4激光器纵模进行了测量,验证了整个系统的工作性能。 By analyzing the working principle of the F-P scanning interferometer, based on the STC89C52RC single-chip microcomputer, the PA93 power amplifier is used to drive the piezoelectric ceramic. The F-P scanning interferometer with a 1 064 nm flattened cavity structure is designed. Endoscopic reflectivity of 98%, fineness 156, cavity length 0.1 ~ 100mm continuously adjustable, corresponding to the free spectral range 1.5 ~ 1 500GHz and resolution of 9.65 ~ 9 650MHz. Piezoelectric ceramic drive voltage and frequency through the 4 × 4 matrix keyboard can be continuously adjustable 0 ~ 200V and 1 ~ 30Hz, displayed on the 1 602 LCD screen. At the same time can communicate with the computer through the RS232 serial port, easy to set the piezoelectric ceramic drive voltage and frequency in the host computer using the LabVIEW software interface. Finally, the F-P scanning interferometer was used to measure the longitudinal mode of the laser diode-pumped Nd: YVO4 laser to verify the performance of the whole system.