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报道了硅纳米孔柱阵列 (Si NPA) ,Fe3O4 复合的Si NPA(Fe3O4 Si NPA)两种薄膜材料的制备方法并对其形貌和结构进行了表征 ,研究了其电容湿度传感特性 .结果表明 ,Si NPA ,Fe3O4 Si NPA均为微米 纳米结构复合体系 .当环境相对湿度从 11%上升到 95 %时 ,采用 10 0Hz的信号频率进行测试 ,以Si NPA和Fe3O4 Si NPA为电介质材料制成的湿敏元件的电容增加值分别为起始值的 15 0 0 %和 5 5 0 0 % ;采用 10 0 0Hz的信号频率测试时 ,则分别为起始值的80 0 %和 12 0 0 0 % ,显示出两种材料较高的湿度灵敏性和较强的绝对电容输出信号强度 .同时 ,在升湿和降湿过程中 ,Si NPA ,Fe3O4 Si NPA都具有较快的响应速度 ,其响应时间分别为 15s,5s和 2 0s,15s.文章结合材料的形貌和结构特性对其物理机理进行了分析 .上述结果表明 ,Si NPA无论是直接作为湿度薄膜传感材料还是作为复合薄膜湿度传感材料的衬底都具有很好的前景 .
The preparation methods of Si NPA and Fe3O4 composite Si NPA (Fe3O4 Si NPA) thin films were reported and their morphology and structure were characterized and their capacitance humidity sensing properties were studied. Results It shows that both Si NPA and Fe3O4 Si NPA are micro-nanostructured composite systems.When the relative humidity of the environment is increased from 11% to 95%, the signal frequency of 10 0 Hz is used for testing, and Si NPA and Fe3O4 Si NPA are used as dielectric materials Of the wet-sensitive components of the capacitance increase value of the starting value of 15 0 0% and 5 5 0 0%; the use of 10 0 0 Hz signal frequency test, respectively, the initial value of 80 0% and 12 0 0 0 %, Showing high humidity sensitivity and strong absolute capacitive output signal intensity of the two materials.At the same time, both Si NPA and Fe3O4 Si NPA have a faster response speed during the process of rising and falling humidity, the response Time is respectively 15s, 5s and 20s, 15s.The physical mechanism of the material is analyzed based on its morphology and structural characteristics.The above results show that the Si NPA is directly used as a humidity sensing material or as a composite film The sense of the substrate material has very Good prospects.