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基于傅里叶模式理论分析了双层浮雕型导模共振光栅的共振效应,分别讨论了光栅的槽深、剩余厚度、周期以及填充系数对峰值反射率、带宽、旁带反射率的影响.数据计算表明,欠刻蚀情形的误差宽容度远远优于过刻蚀情形,两者在光栅槽深相对误差小于15%的范围内,都能保证共振峰的衍射效率高于99.5%,在相同的误差范围内,共振峰线宽的相对误差将分别达到7%和60%,因此厚度误差集中反映在对共振线宽的改变上.另外,光栅周期和填充系数的变化将明显改变共振峰中心波长和线宽.
Based on the Fourier mode theory, the resonance effect of the double-layered relief guided-mode resonant grating is analyzed and the influence of grating depth, remaining thickness, period and filling factor on peak reflectivity, bandwidth and sideband reflectance are discussed respectively. Data The calculation shows that the tolerance of under-etching is much better than that of over-etching. The relative error of grating groove depth is less than 15%, the diffraction efficiency of the formant can be guaranteed to be higher than 99.5% , The relative error of the resonance line width will reach 7% and 60% respectively, so the thickness error is mainly reflected in the change of resonance line width.In addition, the change of grating period and filling coefficient will obviously change the center of resonance Wavelength and line width.