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文中研究了谐振方法测量流体黏度的测量机理,采用MEMS工艺设计并加工了微悬臂梁结构的流体黏度传感器芯片,芯片作为振动体采用电磁激励和压阻检测的方法进行粘度测量。设计了封装结构并搭建了实验系统,在室温环境20℃和25℃2个温度点下进行了4种有机流体的黏度测量。实验结果表明,微悬臂梁结构的谐振式MEMS黏度传感器具有响应速度快、微型化程度高、易于实现在线流体测量等特点,黏度的测量精度优于8%,较好地满足了流体黏度的工程测量需求。
In this paper, the measurement mechanism of the viscosity of the fluid measured by the resonance method is studied. The fluid viscosity sensor chip with micro-cantilever structure is designed and machined by MEMS technology. The chip is measured by electromagnetic excitation and piezoresistive method. The structure of the package was designed and the experimental system was set up. The viscosity measurements of four kinds of organic fluids were carried out at room temperature, 20 ℃ and 25 ℃. The experimental results show that the resonant MEMS viscometer with microcantilever structure has the characteristics of fast response, high degree of miniaturization and easy measurement of on-line fluid. The measurement accuracy of viscosity is better than 8%, which can better meet the requirements of fluid viscosity engineering Measurement needs.