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采用溶胶-凝胶法在普通载玻片上旋涂制备出Al、N、F三掺杂Zn O薄膜(Zn O∶Al/N/F),分别研究溶胶浓度和掺杂浓度对薄膜结构、表面形貌以及光电性能的影响。通过X射线衍射仪、扫描电子显微镜、可见分光光度计、双电测四探针电阻率测试仪进行测试与分析。结果表明:制备出的Zn O∶Al/N/F薄膜致密均匀,平整光滑,为高结晶质量的(002)C轴择优取向;当溶胶浓度为0.75 mol/L、掺杂浓度为0.90at%时,薄膜在可见光范围内(390~780 nm)的平均透过率可达87.9%,掺杂浓度为1.05at%时电阻率最小,为0.23Ω·cm。
Al, N, F doped Zn O thin films (Zn O: Al / N / F) were prepared by sol-gel method on common glass slides. The effects of sol concentration and doping concentration on the structure, Morphology and optical properties of the impact. By X-ray diffraction, scanning electron microscopy, visible spectrophotometer, dual electric four-probe resistivity tester for testing and analysis. The results show that the as-prepared Zn O: Al / N / F thin films are dense, smooth and smooth and have a preferred orientation of (002) C axis with high crystallinity. When the sol concentration is 0.75 mol / L and the doping concentration is 0.90 at% , The average transmittance of the film in the visible range (390-780 nm) can reach 87.9%, and the resistivity of the film can reach 0.23 Ω · cm at the 1.05 at% doping concentration.