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为了精确地检测大口径非球面面形质量,将曲面圆形计算全息图与补偿镜相结合,应用于非球面折射式检测光学系统中。分析了曲面计算全息图的衍射特性,同时分别阐述了利用曲面计算全息图的这种衍射特性来检测凹非球面及凸非球面的基本原理和方法,给出了具体的设计实例。与传统的非球面检测光学系统相比较,该系统不仅简化了传统光学系统的装调过程,还可以大大降低计算全息图(CGH)与补偿镜的制作精度,减少制作成本。尤其是在凸非球面检测过程中,首次在实验技术方面提出了两步全孔径检测法和调整误差的旋转相减消除法,实验验证了该方法的有效性。
In order to accurately detect the surface quality of large-aperture aspheric surfaces, a circular circular hologram is combined with a compensating mirror and used in an aspheric refractive-type detection optical system. At the same time, the basic principle and method of detecting concave aspheric surface and convex aspherical surface by using this diffraction characteristic of curved surface hologram are respectively expounded, and the concrete design examples are given. Compared with the traditional aspheric detection optical system, this system not only simplifies the setup process of the traditional optical system, but also greatly reduces the manufacturing precision of the CGH and the compensation mirror and reduces the production cost. Especially in the process of convex aspheric detection, the two-step full aperture detection method and the rotation subtraction elimination method for adjusting the error are proposed for the first time in the experimental technology. Experiments show the effectiveness of the method.