用于在塑料基底上镀膜的物理气相沉积材料优化

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New or optimized-mixed evaporation materials of PIZOLIN, ALVIRIT, ROMA, and TiO53[1] on the basis of high-index pure substances of TiO2, Nb2O5, CeO2, ZrO2, and Ta2O5 are developed with the aim of identifying dielectric materials with specific refractive indices, reduced film stress, better wear or humidity resistance, and improved ultraviolet (UV) blockage compared to pure substances. Materials are tested in conventional and slightly ion-assisted deposition using process windows typical for coating polymeric substrates. Films with refractive indices in the range of 2.08–2.40, as well as tunable film stress below values for pure substances, are observed. In some cases, the admixture leads to a shift in absorption edge or improvement in moisture resistance of films. Individual results based on the new formulation on film materials with blue colour in transmission (OLIVIN P) in metal and metal oxide mixtures are presented.
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