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利用自制的微弧氧化装置,选用合适的电解液及工艺参数,在Ti基体上直接沉积钛酸盐系铁电薄膜。利用X射线、扫描电镜对薄膜的相组成、形貌进行了分析。结果表明,在本实验条件下,在Pb(CH3COO)2及BaCl2溶液中无法沉积出PbTiO3及BaTiO3,在Ba(CH3COO)2及Ba(OH)2溶液中成功沉积出BaTiO3薄膜;形貌分析表明,BaTiO3晶粒呈鳞片状,薄膜表面散布着许多微孔。
Titanium-based ferroelectric thin films are directly deposited on Ti substrate by using a homemade micro-arc oxidation device, using the appropriate electrolyte and process parameters. The phase composition and morphology of the films were analyzed by X-ray and SEM. The results show that PbTiO3 and BaTiO3 can not be deposited in the solution of Pb (CH3COO) 2 and BaCl2, BaTiO3 thin films are successfully deposited in the solution of Ba (CH3COO) 2 and Ba (OH) 2 under the experimental conditions. , BaTiO3 crystal was flaky, the film surface with many micropores.