硅基盘型谐振腔由于其高品质因数Q值的特性,作为谐振式陀螺的核心元件,有望实现谐振式陀螺的小型化、集成化,成为目前谐振式陀螺中研究的基础。谐振式陀螺的极限灵敏度受谐振腔的DQ乘积(谐振腔直径D与Q值的乘积)的大小直接影响,提出制作大尺寸的盘型谐振腔获得高的DQ乘积,从而提升谐振式陀螺的极限灵敏度。通过理论计算仿真得到盘型谐振腔的Q值、DQ乘积以及陀螺灵敏度与谐振腔直径D的对应关系及其原因,实验中,采用传统半导体工艺制备不同直径的盘型腔(400μm~10 mm),通过与锥形光纤进行耦合测试得到输出透射谱线,得到盘型谐振腔直径D与Q值的变化成正比关系,得到最优的盘型腔参数,当D=10 mm时,Q值可达1.2×106,通过提升工艺精度以及后续优化还有极大的提升空间,理想条件下将实验得到的数据通过理论计算得到谐振式陀螺灵敏度可达0.02°/s,提供了一种提高谐振式陀螺灵敏度的思路。 Due to its high quality factor Q value, silicon-based disk resonators are expected to be the miniaturization and integration of resonant gyroscopes as the core components of resonant gyroscopes, and become the basis of current research on resonant gyroscopes. The ultimate sensitivity of the resonant gyroscope is directly affected by the size of the DQ product (the product of the cavity diameter D and the Q value) of the resonant cavity. It is proposed that a large DQ product can be obtained to create a large DQ product, thereby increasing the limit of the resonant gyroscope Sensitivity. Through the theoretical calculation and simulation, the corresponding relationship between Q value, DQ product, gyro sensitivity and cavity diameter D of the disk resonator is obtained. In the experiment, the disk cavity with different diameters (400μm ~ 10mm) , The output transmission spectrum was obtained through the coupling test with the tapered optical fiber, the diameter D and Q value of the disk-type resonant cavity was proportional to the change, and the optimal disk cavity parameters were obtained. When D = 10 mm, the Q value was Up to 1.2 × 106, there is still much room for improvement by improving process accuracy and subsequent optimization. Under ideal conditions, the experimental gyroscope’s sensitivity can reach 0.02 ° / s through theoretical calculation, which provides a method to increase the resonance frequency Gyro sensitivity ideas.