采用中心波长800nm、脉宽130fs、频率1kHz的飞秒激光脉冲对316L不锈钢样品,在高真空环境中进行了微结构制备研究。实验获得了飞秒激光对316L不锈钢的单脉冲烧蚀阈值;并分别对高于和低于能量阈值的激光在多次脉冲下激光能量的累积效应进行了实验研究。实验结果表明:高于阈值的单脉冲能量100μJ,随着脉冲次数的增加,分别获得了亚微米级激光诱导周期性表面结构(LIPSS)、微米级波纹结构和微米级锥状钉结构;低于阈值的单脉冲能量20μJ,在累积脉冲下也能获得LIPSS和微米级波纹结构。 The microstructural preparation of 316L stainless steel was investigated in a high vacuum environment using femtosecond laser pulses with central wavelength 800nm, pulse width 130fs and frequency 1kHz. The single-pulse ablation threshold of femtosecond laser on 316L stainless steel was experimentally obtained. The cumulative effects of laser energy on multiple impulses of laser above and below the threshold of energy were experimentally studied. The experimental results show that the single pulse energy above the threshold value is 100μJ, and the submicron laser-induced periodic surface structure (LIPSS), micron-scale corrugated structure and micron conical structure are obtained with the increase of the number of pulses, respectively. Threshold single-pulse energy 20μJ, in the cumulative pulse LIPSS and micron-level ripple structure can be obtained.