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本研究是为了设计一套大流量、清洁的真空差分系统.计算了超重反冲核实验装置终端真空差分系统各级的真空度;介绍了差分系统的设计和真空泵、测量设备选择;选择能在高压强下连续运行的新型分子/增压泵作为过渡流范围内的主排气泵,对分子增压泵进行了性能测试并对差分系统进行了模拟靶室实验,最后对实验结果进行了分析.
The purpose of this study is to design a set of high-flow and clean vacuum differential systems. The vacuum of each stage of the vacuum differential system is calculated. The design of the differential system and the selection of the vacuum pump and measuring equipment are introduced. As a main exhaust pump in the transition flow range, a new type of molecular / booster pump operating continuously under high pressure was used to test the performance of the molecular booster pump and simulate the target chamber experiment for the differential system. Finally, the experimental results were analyzed.