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提出了一种可用于绝对距离测量的光纤扫描干涉仪。基于数字信号处理技术,设计了一种算法,从而有效地提高了相位的分辨率、滤除噪声和干扰并克服了扫描过程中波长的随机晃动,可达到距离测量所要求的0.05μm的精度和0.01μm的分辨率
An optical fiber scanning interferometer can be used to measure the absolute distance. Based on the digital signal processing technology, an algorithm is designed to effectively improve the phase resolution, filter out noise and interference and overcome the random fluctuation of the wavelength in the scanning process, which can achieve the required precision of 0.05μm And 0.01 μm resolution