基于介质/金属膜结构空芯波导的原理,制作了用于太赫兹波传输的大口径柔性介质/金属膜波导。针对大口径的特点,设计改良了液相镀膜法并制作了具有不同介质膜厚的柔韧波导。对制作波导的介质膜厚和损耗谱等进行了理论分析和实验验证。采用发射频率为2.5 THz的量子级联激光器,对介质/金属膜结构太赫兹空芯波导的传输损耗、弯曲附加损耗以及光斑能量分布特性等进行了实验研究。结果表明,传输损耗及弯曲附加损耗均随介质膜厚的增加而减小,光斑能量则随介质膜厚的增加更加集中于低阶传输模式。 Based on the principle of hollow-core waveguide with dielectric / metal film structure, a large-diameter flexible dielectric / metal-film waveguide for terahertz wave transmission is fabricated. For the characteristics of large diameter, the design improved the liquid coating method and produced a flexible waveguide with different film thickness. The waveguide dielectric film thickness and loss spectrum were theoretically analyzed and experimentally verified. The transmission loss, bending additional loss and spot energy distribution of terahertz hollow core waveguide with medium / metal film structure were investigated by using a quantum cascade laser with 2.5 THz emission frequency. The results show that both the transmission loss and the additional bending loss decrease with the increase of the film thickness. The spot energy is more concentrated in the low-order transmission mode with the increase of the dielectric film thickness.