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从理论和实验出发,分析脉冲电弧源的放电机理,讨论了脉冲电弧源发散特性,得到影响膜厚空间分布的主要因素,建立膜厚空间分布和主要因素之间的数学模型,结果表明和实验数据吻合。
Based on the theory and experiment, the discharge mechanism of pulsed arc source was analyzed. The divergence characteristics of pulsed arc source were discussed. The main factors influencing the spatial distribution of film thickness were obtained. The mathematical model between spatial distribution of film thickness and main factors was established. Data match.