用椭偏法测量了入射光波长0.632μm、入射角50°至85°时某合金钢的光学常数。考虑材料表面的粗糙度,用Ohlidal-Lukes理论对所测光学常数值进行修正,发现椭偏参量的修正量随入射角增大而增大。结果表明,用椭偏法测量合金钢光学常数时采用较小入射角能获得更精确的样片光学常数。 The optical constants of a certain alloy steel were measured by ellipsometry at a wavelength of 0.632 μm and an incident angle of 50 ° to 85 °. Taking the roughness of the material surface into consideration, the value of the measured optical constant is corrected by Ohlidal-Lukes theory, and it is found that the correction amount of the ellipsometric parameter increases with the incident angle. The results show that using the ellipsometric method to measure the optical constants of alloy steel, the smaller incident angle can obtain the more accurate optical constant of the sample.