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针对目前国内集成光学技术的现状,对离子交换玻璃基集成光学技术进行了研究,目标是在建立起一个离子交换玻璃基集成光学制作平台,并在此基础上研制出低成本的光通信用光功分器。通过对玻璃基离子交换工艺进行的研究,包括电场辅助离子交换、电场辅助退火、K~+离子掩膜工艺等,成功制备了具有低传输损耗和优良偏振相关损耗的掩埋式光波导;通过对基于 Y 分支器的光功分器结构的优化,成功研制了1×4、1×8、1×16、1×32的功分器,器件的主要性能指标已经“达到同类产品的国际水平”。此外,还进行了新型光学器件制作方面的研究。
In view of the current status of integrated optical technology in China, the ion-exchange glass-based integrated optical technology has been studied. The goal is to establish an ion exchange glass-based integrated optical manufacturing platform and to develop low-cost optical communication light Splitters. The buried optical waveguide with low transmission loss and excellent polarization-related loss has been successfully prepared through the research on glass-based ion exchange technology, including electric field assisted ion exchange, electric field assisted annealing, K + ion masking process and so on. Based on the Y splitter optical power splitter structure optimization, successfully developed a 1 × 4,1 × 8,1 × 16,1 × 32 power splitter, the device’s main performance indicators have been “to reach the international level of similar products ”. In addition, a new type of optical device manufacturing research.