本文提出利用衍射光栅的反射特性,在自光图像处理系统中对光栅进行实时无损伤检验.这种方法灵敏度高、简便易行,有较高的实用价值.理论与实验结果一致. In this paper, the real-time non-destructive testing of the grating in the self-light image processing system is proposed by using the reflection characteristics of the diffraction grating, which has the advantages of high sensitivity, simple and easy operation and high practical value. The theoretical and experimental results are consistent.