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介绍了一种表面微机械系统开关 ,悬臂材料为Au SiOxNy Au铬金作为电欧姆接触。用静电激励 (激励电压为 1 3V)方式 ,测试其隔离度。获得结果为微机械开关在 1～ 4 0GHz的范围内隔离度可高达 35dB。我们采用对开关施加激励方波脉冲的方法测试寿命。结果寿命接近 1 0 5,应用ANSYS对几种不同的MEMS射频接触悬臂开关模型进行了力电耦合分析和失效机理。
A surface micromachined system switch is introduced. The cantilever material is Au SiOxNy Au chrome gold as an electrical ohmic contact. With electrostatic excitation (excitation voltage of 1 3V) way to test the isolation. The result is micromechanical switching in the range of 1 ~ 4 0GHz isolation up to 35dB. We test the life of the switch by applying a stimulus square wave pulse. The results of life expectancy close to 105, the application of ANSYS on several different MEMS RF contact cantilever switch model of the coupling analysis and failure mechanism.