采用磁控溅射和退火技术制备出Au/SiO2纳米复合薄膜。利用扫描电子显微镜(SEM),X射线衍射(XRD)和原子力显微镜(AFM)对上述纳米复合薄膜进行了结构表征。实验结果表明,纳米复合薄膜的表面上均匀分布着直径在100～300nm的金纳米颗粒。金纳米颗粒的大小随着退火时间的增加而增大。用荧光光谱仪(PL)对薄膜的光致发光特性进行了研究。结果表明,在激发波长为325nm时,分别在525nm和560nm处出现两个发光峰;在激发波长为250nm时,在325nm处出现发光峰,这一发光峰可能与非晶SiO2的结构缺陷有关。 Au / SiO2 nanocomposite films were prepared by magnetron sputtering and annealing techniques. The nanocomposite films were characterized by SEM, XRD and AFM. The experimental results show that the surface of nanocomposite film is uniformly distributed with gold nanoparticles with diameter of 100 ~ 300nm. The size of gold nanoparticles increases with annealing time. The photoluminescence properties of the films were investigated by fluorescence spectroscopy (PL). The results show that two luminescence peaks appear at 525nm and 560nm respectively when the excitation wavelength is 325nm. The luminescence peak appears at 325nm at the excitation wavelength of 250nm, which may be related to the structural defects of amorphous SiO2.