论文部分内容阅读
采用中频磁控溅射结合离子束混合技术在不锈钢基体上制备C-SiC涂层。对制备的涂层进行能量5 keV、剂量1×1018ions/cm2的氢离子注入,模拟涂层阻止氢渗透。之后,分别将样品从273 K加入到1173 K。采用SEM、XPS和SIMS分析表面形貌、表面成分及各元素的深度分布。结果表明,不同温度的加热处理使涂层的成分发生变化,在723 K以下温度处理时,C-50%SiC涂层仍能保持非常好的氢阻止性能,在1023 K以上温度处理时,涂层不再具有阻氢性能。
C-SiC coatings were prepared on stainless steel by IF magnetron sputtering and ion beam mixing. The prepared coating was subjected to hydrogen ion implantation with an energy of 5 keV and a dose of 1 × 10 18 ions / cm 2, and the simulated coating prevented hydrogen permeation. Afterwards, the samples were added from 273 K to 1173 K, respectively. Surface morphology, surface composition and depth distribution of each element were analyzed by SEM, XPS and SIMS. The results showed that the composition of the coating changed with the heat treatment at different temperatures. When the temperature was below 723 K, the C-50% SiC coating could still maintain a very good hydrogen resistance. When the temperature was above 1023 K, the coating The layer no longer has hydrogen-blocking properties.