猫眼回波图像随CMOS器件激光损伤变化的实验研究

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成像系统中的CMOS探测器被激光损伤后,其猫眼回波会发生变化。对猫眼回波图像的变化进行了实验研究,发现随着用于损伤的激光功率增加,CMOS器件的微透镜发生分解,直至最终消失,并使器件表面形成由遮光铝膜和光敏区构成的二维光栅,猫眼回波图像内的阵列光斑也经历了逐步消失又恢复的过程。以高斯随机表面模拟微透镜表面形貌,建模计算了猫眼回波图像随微透镜损伤程度的变化,计算结果与实验现象相符。 The CMOS detector in the imaging system is damaged by the laser and its cat’s eye echo changes. The experimental results show that with the increase of the laser power used for the damage, the microlens of the CMOS device decomposes until it finally disappears, and the two-dimensional structure formed by the light-shielding aluminum film and the photosensitive area is formed on the surface of the device Grating, cat’s eye echo image within the array spot has also gone through the gradual disappearance and recovery process. The Gaussian random surface was used to simulate the surface morphology of the microlens. The change of the cat’s eye echo image with the damage degree of the microlens was calculated. The calculated results are consistent with the experimental results.
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