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以正硅酸乙酯(TEOS)和硅油为前驱体,在碱性催化体系中制备出有机硅改性二氧化硅溶胶,采用提拉法获得了具备疏水性能的二氧化硅减反膜。通过透射电镜、扫描探针显微镜、红外光谱、分光光度计、表面轮廓仪等多种方法研究了改性后的膜层性能。在高湿度环境中存放两周后,在波长确定的情况下,常规二氧化硅减反膜透过率由99.2%降到了96.5%,疏水改性膜层透过率仍然高于99%。与常规减反膜相比,疏水改性减反膜在高湿度条件下防止潮气侵蚀的性能得到了大幅度的提高。
Silica-modified silica sol was prepared by using TEOS and silicone oil as precursors in a basic catalysis system. The hydrophobic anti-reflective silica membrane was obtained by the Czochralski method. The properties of modified films were studied by TEM, scanning probe microscope, infrared spectroscopy, spectrophotometer and surface profilometer. After two weeks of storage in a high humidity environment, the transmittance of the conventional silica antireflection film was reduced from 99.2% to 96.5% at wavelength determination and the hydrophobic modified film layer transmittance was still above 99%. Compared with the conventional anti-reflection film, hydrophobic modified anti-reflection film in high humidity conditions to prevent the performance of moisture erosion has been greatly improved.