介绍了基于激光扫描法的非接触式光学元件曲率半径检测系统,该系统大大提高了光学元件粗磨后曲率半径检测的自动化程度,实现了软硬件结合的一键式面形数据获取。该系统利用x/y轴二维平移台的运动实现网格扫描,同时基于激光扫描法测量面形弧高,并附加有z轴升降台扩展弧高量程。设计了上位机控制程序和人机交互界面,使系统在后期使用中更为灵活便捷。编写了曲面拟合算法,最终实现光学元件面形数据的自动采集、拟合以及相关光学参数的计算,可完成对多种光学元件面形的非接触式检测。实验结果表明,无论待测光学元件的表面落差是否超出激光头测量范围,系统均能完整采集所需面形数据,经过误差处理后,测量精度优于±0.15%,满足粗磨检测要求。 This paper introduces the system of detecting the radius of curvature of the non-contact optical element based on laser scanning. This system greatly improves the automation of detecting the radius of curvature of the optical element after rough grinding, and realizes the one-touch data acquisition of the hardware and software. The system utilizes the movement of the x / y axis two-dimensional translation stage to realize the grid scanning. Meanwhile, the surface arc height is measured based on the laser scanning method, and the z-axis lifting platform is extended with the arc height range. The design of PC control program and human-computer interaction interface make the system more flexible and convenient in later use. The surface fitting algorithm is written and the automatic acquisition and fitting of the optical surface profile data and the calculation of the related optical parameters are completed. The non-contact detection of the surface shapes of various optical components can be completed. The experimental results show that the system can fully collect the required surface shape data regardless of whether the surface drop of the optical element to be measured exceeds the measurement range of the laser head. After the error processing, the measurement accuracy is better than ± 0.15%, which meets the requirements of the coarse grinding test.