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比较分析四种微加工工艺的基本特征和技术难点,简述准分子激光与Nd∶YAG激光微制造技术的特点和应用范围。结合华中科技大学准分子激光微制造工作站的建设及其在微钻孔、微切割等方面的实际应用,分析准分子激光在MEMS(微机电系统)键合、焊接、封装过程中应用的可能性。
The basic characteristics and technical difficulties of four micromachining processes are compared and analyzed. The characteristics and application of excimer laser and Nd:YAG laser micromachining technology are briefly described. Based on the practical application of excimer laser micromanufacturing workstation in Huazhong University of Science and Technology and its application in micro drilling and micro cutting, the possibility of application of excimer laser in MEMS (Micro Electro Mechanical System) bonding, welding and packaging is analyzed .