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对于光学波导与导波设备、电路的制造而言,溶胶-凝胶工艺的出现不失为一种有效途径。特别是集成光学有源器件及电路中掺活性掺杂物(如钕、铒、铈)。本文回顾了基于溶胶-凝胶工艺的有源器件、电路的最新研究。对于光学放大器中的激活溶胶-凝胶薄膜的模拟分析,我们提出激光器原子磁化理论及其速率方程,适当考虑了波导参数。采用波束传播法研究激活掺杂溶胶-凝胶薄膜设备(如直线波导、丫形支管、定向耦合器)的传播及增益特性。也在研究掺铈薄膜中布拉格光栅的形成,在微电机系统(MEMS)的未来应用也在研究中,可采用溶胶-凝胶工艺形成光层,并通过机械作用加以控制。
For the optical waveguide and guided wave equipment, the manufacture of the circuit, the sol-gel process appears to be an effective way. Especially integrated optical active devices and circuits doped with active dopants (such as neodymium, erbium, cerium). This article reviews the latest research on active devices and circuits based on sol-gel processes. For the simulation analysis of activated sol-gel films in optical amplifiers, we propose the theory of laser atomic magnetization and its rate equation, with appropriate consideration of the waveguide parameters. Beam propagation method is used to study the propagation and gain characteristics of activated doped sol-gel film equipment such as linear waveguide, Y-shaped branch pipe and directional coupler. The formation of Bragg gratings in cerium-doped films is also under study. Future applications of micro-electromechanical systems (MEMS) are also under study. Sol-gel processes can be used to form the optical layers and control by mechanical action.