The surface defect distribution in stainless steel irradiated with intense pulsed ion beam(IPIB) of current density above 60A/cm2 and acceleration voltage 300-500keV wasdiscussed and analyzed. The defects near the surface of stainless steel were generatedin two ways: (1) generated by the bombardment of energetic ions and (2) induced bythe high level stress near the surface. Thus the temperature and stress distributionsnear the steel surface were calculated by means of our STEIPIB code, which treatedwith the thermal-dynamical process in the target irradiated by the IPIB. Based onthese distributions, the generations and movements of these defects were discussedand compared with the experiment results.