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针对金刚石涂层在小孔径内孔上制备的难点,提出双层热丝布局的不穿丝技术来实现热丝化学气相沉积金刚石薄膜在小孔径拉丝模内孔的沉积。基于有限容积法和正交试验法,对关键沉积区域基体进行了温度场仿真分析,对热丝参数(直径D1、D2,热丝与基体间距S1、S2)进行了仿真优化。选取优化参数组合进行了小孔径拉丝模金刚石涂层制备实验,分别采用扫描电子显微镜和拉曼光谱仪对上述方法制备的金刚石涂层进行了表征。结果表明:通过上述优化及实验在小孔径拉丝模内孔表面成功沉积了高质量,均匀性好的金刚石涂层,为其批量化制备提供了关键技术支撑。
Aiming at the difficulty of preparation of diamond coating on the hole with small diameter, the non-threading technology of double-layer hot wire layout is proposed to realize the deposition of hot-filament CVD diamond film in the hole of small-diameter wire drawing die. Based on the finite volume method and the orthogonal experiment method, the temperature field of the critical depositional area was simulated and the hot wire parameters (diameter D1, D2, hot wire and matrix spacing S1, S2) were simulated and optimized. The optimum parameters were selected to prepare the diamond-coated small-diameter wire drawing dies. The diamond coatings prepared by the above method were characterized by scanning electron microscopy and Raman spectroscopy. The results show that diamond coating with high quality and good uniformity is successfully deposited on the inner surface of the small diameter wire drawing die through the above optimization and experiment, which provides the key technical support for the batch preparation.