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设计并研制了一种新型光纤法布里-珀罗压力传感器,通过光刻、硅片刻蚀、阳极键合等微机电系统技术制作而成,适合恶劣环境下、狭小空间内的微压环境压力测量。详细阐述了传感器的结构设计和制作方式。该设计巧妙地利用了光纤法兰盘,保证了光纤端面与敏感膜的平行,从而形成高质量的法布里-珀罗干涉腔。该结构也有利于初始腔长的稳定,减小了传感器误差。建立了实验解调系统,对其压力、温度等特性进行了详细的测试。实验结果表明,在0~0.1MPa的压力范围内,传感器线性度好,重复性高,灵敏度达到了61.6μm/MPa。
A new type of fiber optic Fabry-Perot pressure sensor is designed and developed. It is made by micro-electromechanical system technology such as photolithography, silicon wafer etching and anode bonding. It is suitable for the micro-pressure environment pressure in the narrow space under harsh environment measuring. Described in detail the structure of the sensor design and production methods. The design clever use of the optical fiber flange, to ensure that the optical fiber end face and sensitive film parallel to form a high-quality Fabry-Perot interference cavity. The structure is also conducive to the stability of the initial cavity length, reducing the sensor error. The experimental demodulation system was established and its pressure, temperature and other characteristics were tested in detail. The experimental results show that the sensor has good linearity and repeatability within the pressure range of 0 ~ 0.1MPa, and the sensitivity reaches 61.6μm / MPa.