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结合光子晶体的局域特性与多孔硅特有的光学特性,提出一种镜像对称多孔硅光子晶体折射率传感结构。基于分层传输矩阵法建立传感理论模型,得出缺陷波长与其基本结构参数的关系。改变多孔硅高低折射率层的结构参数,可使缺陷峰的半峰全宽变窄,进而使其品质因数(Q值)得到提高。根据传输矩阵理论,对不同浓度甲醇蒸汽进入到该传感结构前后的反射光谱进行理论仿真,得出其光谱特性,推导出由于环境折射率影响引起的传感层等效折射率改变与缺陷峰漂移之间的数学模型,并进行数值模拟分析。结果显示:该传感器结构的Q值为3114.75,灵敏度为903.9 nm/RIU,可为微型化与高分辨率传感器的设计提供一定的技术参考。
Combining the local characteristics of photonic crystals with the optical properties unique to porous silicon, a mirror symmetric porous silicon photonic crystal refractive index sensing structure is proposed. Based on the hierarchical transmission matrix method, a sensing theoretical model is established, and the relationship between the defect wavelength and its basic structural parameters is obtained. Changing the structural parameters of the high and low refractive index layers of porous silicon can narrow the full width at half maximum of the defect peak and further improve its quality factor (Q). According to the transfer matrix theory, the reflection spectra of methanol vapor with different concentrations before and after entering into the sensing structure are theoretically simulated, the spectral characteristics are obtained, and the change of the equivalent refractive index and the defect peak caused by the influence of the environmental refractive index Drift between the mathematical model, and numerical simulation. The results show that the sensor has a Q of 3114.75 and a sensitivity of 903.9 nm / RIU, which can provide a technical reference for the design of miniaturized and high resolution sensors.