自从1950年Bayard-Alpert电离计发明以来,真空技术逐步向超高真空领域推进。特别是现代科学技术──原子能、电子计算机和空间技术的发展,又进一步促进了超高真空技术。 旱期获得超高真空的主要手段是油扩散泵系统,但是这种泵的工作液是污染系统的主要来源。现在有许多场合对真 Since the invention of the Bayard-Alpert ionization gauge in 1950, vacuum technology has been progressively evolving into the ultrahigh vacuum field. In particular, advances in modern science and technology - atomic energy, computer science and space technology, further promote ultra-high vacuum technology. The primary means of achieving ultra-high vacuum during dry seasons is the oil diffusion pump system, but the working fluid for this pump is the main source of contamination of the system. There are many occasions right now