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本文介绍了一种用固态磷扩散源作磷扩散的工艺方法与反应机理,工艺设备及扩散条件与结构参数的关系,同时实验地确定了该扩散工艺方法中磷掺杂浓度的分布情况。并说明了该磷扩散方法的一个突出优点,即可以运用于泡发射极工艺。
In this paper, a method of phosphorus diffusion using solid-state phosphorus diffusion source and its reaction mechanism, process equipment and the relationship between diffusion conditions and structural parameters are introduced. Meanwhile, the distribution of phosphorus doping concentration in the diffusion process is experimentally determined. And illustrates one outstanding advantage of the phosphorus diffusion method that can be applied to the bubble emitter process.