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针对复杂结构和图案的飞秒激光微加工,提出了一种基于BMP图像边缘跟踪的飞秒激光微加工方法.介绍了采用该方法实现复杂图形飞秒激光微加工的总体思路,讨论了加工路径的提取、优化、跟踪和加工过程的反馈,以及在此基础上开发的飞秒激光微加工数控程序等.并利用此技术成功制备出二维微纳图案.研究结果表明,利用该技术可实现微米至亚微米级特征尺寸复杂图案和微纳结构的飞秒激光数控加工.
Aiming at the femtosecond laser micromachining of complex structures and patterns, a femtosecond laser micromachining method based on BMP image edge tracking is presented. The general idea of using this method to realize microarray processing of complex graphics femtosecond laser is discussed. The machining path Optimization, tracking and processing of the feedback, as well as on the basis of the development of femtosecond laser micro-machining NC program, etc. And the successful use of this technology to prepare two-dimensional micro-nano pattern.The results show that the use of this technology can be achieved Microfluidic to sub-micron feature size complex patterns and micro-nano structure femtosecond laser CNC machining.