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热线性气体传感器作为一种新型的半导体气体传感器,除了具有灵敏度高、响应恢复时间短、稳定性好的特点外,还具有较低的功耗和优良的抗环境温湿度干扰能力,解决了传统旁热式半导体气体传感器中长期存在问题。本文较为详细地介绍了该类传感器的结构、气敏性能以及气敏机理。
As a new type of semiconductor gas sensor, the hot linear gas sensor has the advantages of high sensitivity, short response recovery time and good stability. It also has lower power consumption and excellent resistance to environmental temperature and humidity, and solves the traditional Side-heated semiconductor gas sensor in the long-term problems. This paper introduces the structure, gas sensitivity and gas sensing mechanism of this kind of sensor in more detail.