谐振式微型光学陀螺(RMOG)是利用光学萨格纳克(Sagnac)效应产生的谐振频率差来测量旋转角速度的一种新型光学传感器,光波导环形谐振腔是谐振式微型光学陀螺的核心敏感部件。利用谐振腔内单点反射简化处理,结合多光束干涉叠加原理,得出了谐振腔背向散射输出谱线的表达式。在此基础上,利用激光器输出光频率进行扫描,对研制的保偏二氧化硅光波导环形谐振腔芯片进行了谐振曲线和背向散射谱的测试,得到了描述谐振腔背向散射特性的背向散射系数,实际测试曲线和理论仿真曲线吻合较好。 Resonant miniature optical gyroscope (RMOG) is a new type of optical sensor that measures the angular velocity of rotation by using the resonance frequency difference caused by the optical Sagnac effect. The ring resonator is the core sensitive component of the resonant miniature optical gyroscope . Using the single-point reflection simplified processing in resonant cavity and combined with the principle of multi-beam interference superposition, the expression of resonant cavity backscattering output spectral line is obtained. On this basis, the resonance frequency and the backscattering spectrum of the ring resonator chip fabricated by the polarization-maintaining silica optical waveguide were measured by using the laser output optical frequency. The back-scatter characteristic The scattering coefficient, the actual test curve and the theoretical simulation curve are in good agreement.