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利用光荧光谱及X射线双晶衍射研究了纳米压印工艺对半导体外延材料的影响。利用纳米压印工艺制作了1.55μm通信用分布反馈(DFB)半导体激光器,并对制作的器件进行了老化寿命试验。实验结果表明,采用软模版压印并不会劣化半导体外延材料的特性。制作的半导体激光器预期寿命与普通双光束曝光法制得的器件预期相当,表明纳米压印工艺制作半导体激光器是可靠的。
The influence of nanoimprint technology on the semiconductor epitaxial material was studied by using the fluorescence spectrum and X-ray double crystal diffraction. A distributed 1.55μm distributed feedback (DFB) semiconductor laser was fabricated by nanoimprinting, and the device was aged for life test. The experimental results show that the use of soft stencil imprinting does not degrade the properties of the semiconductor epitaxial material. The expected life expectancy of the manufactured semiconductor laser is comparable to that of the conventional double-beam exposure method, indicating that the nanoimprint process is reliable for manufacturing a semiconductor laser.