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采用随机数的方法在 18～ 2 0 nm波段设计了积分反射率最大的宽带多层膜 ,理论上得到了高于周期膜系 8%的积分反射率 ,同时带宽与视场范围有明显的展宽 ,并用磁控溅射法进行了初步制备。对反射率的相对测试表明 ,与周期膜系相比 ,非周期多层膜的带宽展宽 ,但峰值反射率略有降低。膜厚控制是实验的难点。
In the band of 18 ~ 200 nm, a broadband multi-layer film with the highest integral reflectivity was designed by random number theory. The integral reflectivity was higher than that of the periodic film by 8% in theory, and the bandwidth and the field of view ranged obviously , And the initial preparation by magnetron sputtering method. Relative tests on reflectance show that the bandwidth of the aperiodic multi-layer film broadens but the peak reflectivity slightly decreases compared to the periodic film system. Film thickness control is an experimental challenge.