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叙述了自行研制的移相式泰曼-格林红外干涉仪的工作原理。针对红外光不可见的特点,利用可见光和红外光的共光路调试技术,解决了精确定位红外光路的难题,设计出一套红外干涉仪的调整方案。分别对平面镜、精磨粗糙平面和精磨粗糙球面的面形进行了测试,并使用四步移相算法还原被测波面,给出了结果数据和二维等值图、三维立体图;所测平面镜和精磨粗糙平面的面形偏差为0.077λ(PV),精磨粗糙球面面形偏差为0.520λ(PV)(λ=10.6μm)。结果表明:仪器干涉系统光学质量优于λ/25,重复性优于λ/200,(λ=10.6μm)。
Describes the self-developed phase shift Terman - Green infrared interferometer works. In view of the characteristics of invisible infrared light, the common optical path debugging technology using visible light and infrared light is adopted to solve the problem of accurately positioning the infrared light path and a set of adjustment scheme of the infrared interferometer is designed. The surface shapes of flat mirror, rough grinding surface and fine grinding rough spherical surface were tested respectively. The four-phase phase shifting algorithm was used to reduce the measured wave surface, and the result data and two-dimensional contour map were obtained. The measured plane mirror The deviation from the surface roughness of rough surface was 0.077λ (PV). The deviation of precision spherical surface roughness was 0.520λ (λ = 10.6μm). The results show that the optical quality of the interferometer system is better than λ / 25 and the repeatability is better than λ / 200 (λ = 10.6μm).