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以反式２丁烯为工作气体，采用低压等离子体化学气相沉积法制备 Ｃｘ Ｈ１－ ｘ薄膜。研究了在不同的 Ｈ２ 与反式２丁烯流量比下制备的 Ｃｘ Ｈ１－ ｘ薄膜的傅里叶变换红外光谱（ Ｆ Ｔ Ｉ Ｒ）及 Ｘ Ｐ Ｓ谱的特性。初步探讨了 Ｃｘ Ｈ１－ ｘ的生长机理。膜中ｓｐ３ 杂化碳原子和ｓｐ２ 杂化碳原子的数量以及两者的比例与沉积条件有关。
The trans-2butene was used as working gas, and low-pressure plasma chemical vapor deposition was used to prepare Cx H1-x thin films. The properties of Fourier transform infrared spectroscopy (FT-IR) and XPS spectra of CxHi-x films prepared at different H2 and trans-2-butene flux ratios were studied. The mechanism of Cx H1-x growth was discussed preliminarily. The number of sp3 hybridized carbon atoms and sp2 hybridized carbon atoms in the film and the ratio of the two are related to the deposition conditions.