对射频放电产生单重态氧进行了实验研究,在不同掺杂物种、不同电极间距、不同稀释配比的情况下,研究了单重态氧相对产率的变化规律,分析了单位氧流量注入能量对单重态氧产率和电效率的影响。实验表明,NO和Hg蒸气的加入,使放电产生单重态氧的相对产率都有显著的提高。随着电极间距的缩小,可以实现高气压工作,放电总压可以达到22.6 kPa,氧气分压超过了4.0 kPa,产率方面也有大幅度提高。单位氧流量注入能量在150~400 J/mmol时,单重态氧产率比较高;电效率较高的区域对应的单位氧流量注入能量在150 J/mmol左右。 The experimental study on singlet oxygen generated by radio frequency discharge was carried out. The variation of relative yield of singlet oxygen was studied under different doping species, different electrode spacings and different dilution ratios. The effects of unit oxygen flow rate Effect of energy on singlet oxygen yield and electrical efficiency. The experimental results show that the relative yield of singlet oxygen produced by discharge is significantly increased with the addition of NO and Hg vapor. With the narrowing of electrode spacing, high pressure operation can be achieved. The discharge total pressure can reach 22.6 kPa, the oxygen partial pressure exceeds 4.0 kPa, and the yield rate also increases greatly. The oxygen production rate per unit oxygen flow rate is 150-400 J / mmol and the singlet oxygen production rate is relatively high. The corresponding energy per unit oxygen flow rate is about 150 J / mmol.