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针对目前的离子注入实验都是在真空状态下进行的事实 ,设计了真空内置式大气靶室装置。采用Monte Carlo方法模拟计算了注入离子进入靶室的穿透能量和行迹方向 ,证明真空内置式靶室技术是可行的 ,并用实验验证了注入效果。
In view of the fact that the current ion implantation experiments are carried out in a vacuum state, a vacuum built-in atmospheric target chamber device is designed. The Monte Carlo method was used to simulate the penetrating energy and the direction of travel of implanted ions into the target chamber. It was proved that the built-in vacuum chamber technique was feasible and the injection effect was verified experimentally.