采用电子束刻蚀、机械探针贴膜等方法,构筑了基于气体绝缘层结构的单根酞菁铜纳米线FET式NO_2气体传感器。结果发现,在室温条件下,器件的检测极限为1×10~(–6)(NO_2体积分数),其灵敏度高达2 172%,该结果相比于薄膜气体传感器检测极限降至十分之一。除此之外,该器件在室温条件下可以恢复至基线,在低浓度、室温监测方面有着较好的优势。 A single copper phthalocyanine nanowire FET NO 2 gas sensor based on the structure of gas insulating layer was constructed by electron beam etching and mechanical probe filming. The results show that the detection limit of the device is 1 × 10 -6 (NO 2 volume fraction) at room temperature, and its sensitivity is as high as 2,172%. Compared with the detection limit of the thin film gas sensor, the result is reduced to one tenth . In addition, the device can be restored to baseline at room temperature, and has good advantages in low concentration and room temperature monitoring.