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提出一种新型复合固体润滑膜,并讨论了该复合膜的结构和作用机理。复合结构的基本组成是传统硬质涂层TiN和TiC的结合,最上面的固体润滑膜是用射频等离子体增强化学气相沉积(RFPECVD)方法沉积的类金刚石(DLC)膜。分别用紫外拉曼光谱仪和扫描电子显镜分析薄膜的显微结构和表面形貌,用摩擦磨损实验机测定薄膜的摩擦学特性。结果表明,所制备的薄膜为类金刚石膜,薄膜表面含有大量的类石墨的sp2,能有效的担负固体润滑膜的功能。摩擦过程中产生的转移层也有助于减摩功能的实现。
Proposed a new type of composite solid lubricant film, and discussed the structure and mechanism of the composite membrane. The basic composition of the composite structure is a combination of conventional hard-coating TiN and TiC. The uppermost solid-lubricant film is a diamond-like carbon (DLC) film deposited by radio frequency plasma-enhanced chemical vapor deposition (RFPECVD). The microstructure and surface morphology of the films were analyzed by UV Raman spectroscopy and scanning electron microscopy. The tribological properties of the films were measured by a friction and wear tester. The results show that the prepared film is a diamond-like carbon film, the surface of the film contains a lot of graphite-like sp2, can effectively bear the function of the solid lubricant film. The transfer layer produced during the rubbing also contributes to the realization of anti-friction function.