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以压电陶瓷(PZT)为材料制成的摆镜处于较高频率的工作状态下,对其转动角、俯仰角和轴向位移量进行准确的实时非接触测试是必要的;本文介绍了利用二维连续分布式光电位置探测器PSD作为敏感元件的测量高频摆镜动态性能的高速数据采集系统。利用“M”型光路实现了摆镜二维转角和轴向位移的同时测试;给出了一种二维PSD的非线性快速修正方法,并利用16 通道的A/D卡实现了4 路模拟信号的DMA 传送。
It is necessary to conduct accurate real-time non-contact testing of the rotation angle, pitch angle and axial displacement with the high-frequency workpieces made of piezoelectric ceramics (PZT) as materials. This article introduced the use of Two-dimensional continuous distributed photoelectric position detector PSD as a sensitive element to measure the dynamic performance of high-powered swinging mirror high-speed data acquisition system. The “M” type optical path is used to realize the simultaneous measurement of the two-dimensional rotation angle and the axial displacement of the swinging mirror. A fast non-linear correction method of two-dimensional PSD is given and the four-channel simulation DMA signal transmission.