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利用能量过滤磁控溅射(EFMS)技术制备了TiO_2薄膜,并利用X射线衍射、扫描电镜和紫外-可见分光光度计分析了薄膜的结构、形貌和对RhB溶液的光催化效率。研究表明:与直流磁控溅射技术相比,EFMS技术制备的TiO_2薄膜的晶粒尺寸更小,表面更加平整,紫外光照射2 h后,其光催化效率提高了1.5倍。
TiO 2 films were prepared by energy-filtration magnetron sputtering (EFMS) technique. The structure, morphology and the photocatalytic efficiency of the films were analyzed by X-ray diffraction, scanning electron microscopy and UV-visible spectrophotometer. The results show that compared with DC magnetron sputtering, the size of the TiO 2 films prepared by EFMS is smaller and the surface is smoother. The photocatalytic efficiency of the film is 1.5 times higher than that of DC magnetron sputtering.