一个为强流短脉冲电子枪烘烤排气和阴极分解激活工艺专用的超高真空排气台已完成调试工作。该排气台由电子枪排气用的超高真空机组和一个高真空烘烤炉组成。超高 One for high intensity short pulse gun baking exhaust and cathodic decomposition activation process dedicated ultra-high vacuum exhaust station has completed the commissioning work. The exhaust station by the gun exhaust ultra-high vacuum unit and a high vacuum baking oven composition. Very high