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以辐射度学为理论基础,研究了紫外ICCD(UV-ICCD)面的响应均匀性测试技术。论述了200～300nm UV-IOED面均匀性的测试方案。使用入射口径为100μm的光谱仪对UV-ICCD靶面处的均匀性进行了测试。测试结果表明,靶面处辐照度场的不均匀性不高于1.6%。在对靶面处的均匀性进行测试的基础上,对UV-ICCD面的均匀性进行了实际测量,并进行了不确定度分析。结果表明,该方案可应用于UV-ICLD光电探测器件的面均匀性测量。
Based on the radiometric theory, the response uniformity test technique of UV ICCD (UV-ICCD) was studied. The test scheme of UV-IOED surface uniformity of 200 ~ 300nm was discussed. The uniformity of the UV-ICCD target surface was tested using a spectrometer with a 100 μm entrance diameter. The test results show that the uniformity of the irradiance field at the target surface is not higher than 1.6%. Based on the testing of the uniformity of the target surface, the uniformity of the UV-ICCD surface was measured and the uncertainty was analyzed. The results show that this scheme can be applied to the surface uniformity measurement of UV-ICLD photodetection devices.