论文部分内容阅读
采用溶胶 凝胶法 ,在Pt Ti SiO2 Si衬底上逐层制备了BaTiO3 SrTiO3 多层膜 .从多层膜的XRD图可看出明显的双峰 ,分别对应为BaTiO3 和SrTiO3 的特征峰 ,表明样品已形成了多层膜结构 .与同厚度的Ba0 5Sr0 5TiO3 单层膜比较 ,BaTiO3 SrTiO3 多层膜的介电系数得到了明显的增强 ,在频率为 10kHz时 ,周期为 6 6nm的BaTiO3 SrTiO3 多层膜相对于同厚度的Ba0 5Sr0 5TiO3 薄膜的介电系数从 2 45增强到 5 95 ,而损耗依然保持较低 ,分别为 0 0 2 9和 0 0 33.研究同时表明 ,BaTiO3 SrTiO3 多层膜与单层膜的介电频率色散程度、C V特性和介电系数与温度的关系均略有不同
BaTiO3 SrTiO3 multilayer films were prepared on Pt Ti SiO2 Si substrate by sol-gel method, and the obvious double peaks were observed from the XRD patterns of multilayer films, corresponding to the characteristic peaks of BaTiO3 and SrTiO3, respectively The sample has formed a multi-layer film structure.Compared with the same thickness of Ba0 5Sr0 5TiO3 monolayer, the dielectric constant of BaTiO3 SrTiO3 multilayers has been significantly enhanced, the number of BaTiO3 SrTiO3 multilayers with a period of 6 6nm The dielectric constant of the film relative to the Ba0 5Sr0 5TiO3 thin film with the same thickness increased from 2 45 to 5 95 while the loss remained low at 0 0 2 9 and 0 0 33. The study also showed that the dielectric constant of the BaTiO3 SrTiO3 multilayer The dielectric frequency dispersion, CV characteristics, and dielectric constant versus temperature of the monolayer film are slightly different